PRESENTATION

Powerful metrology use cases - Addressing compound material industry needs

Over the years, the growing number of electric vehicles has been fueling the demand for novel material systems with superior properties compared to Si for RF & power device applications. Compound semiconductors offer improved electrical and thermal properties, yet their ever-evolving fabrication methods require precise process control in high volume manufacturing to maintain device stability and end product quality. The presentation aims to demonstrate the "powerful” measurement capability of tools developed by Semilab on both substrates and epilayers. Some of the covered applications include nondestructive, distinct electrical characterization methods, layer thickness measurements and other solutions to address metrology needs of device manufacturers.